Atom beam source
- 1 January 1984
- Vol. 34 (1-2), 259-261
- https://doi.org/10.1016/0042-207x(84)90138-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- FAB: The fast atomic beam sourceInternational Journal of Mass Spectrometry and Ion Physics, 1983
- Ion beam etching using saddle field sourcesThin Solid Films, 1981
- Properties and applications of saddle-field ion sourcesJournal of Vacuum Science and Technology, 1979
- Ion-Beam Techniques for Device FabricationJournal of Vacuum Science and Technology, 1971