Vaporized-metal cluster formation and effect of kinetic energy of ionized clusters on film formation
- 1 June 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 92 (1-2), 137-146
- https://doi.org/10.1016/0040-6090(82)90196-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Vaporized-metal cluster formation and ionized-cluster beam deposition and epitaxyThin Solid Films, 1981
- Film formation technique by ionized-cluster beamSurface Science, 1981
- Characteristics of thin films formed by the ionized-cluster beam techniqueJournal of Crystal Growth, 1978
- An evaluation of metal and semiconductor films formed by ionized-cluster beam depositionThin Solid Films, 1976