Analysis of cubic boron nitride thin films by neutron depth profiling
- 30 April 1994
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 3 (4-6), 728-731
- https://doi.org/10.1016/0925-9635(94)90258-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Influence of sputtering target material on the formation of cubic BN thin films by ion beam enhanced depositionDiamond and Related Materials, 1993
- Neutron depth profiling: Overview and description of NIST facilitiesJournal of Research of the National Institute of Standards and Technology, 1993
- The NIST Cold Neutron Research FacilityJournal of Research of the National Institute of Standards and Technology, 1993
- Formation of cubic boron nitride films by arc-like plasma-enhanced ion plating methodJournal of Vacuum Science & Technology A, 1990
- On the formation of BN films by ion beam and vapor depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988