Doping of SiC by Implantation of Boron and Aluminum
- 1 July 1997
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 162 (1), 277-298
- https://doi.org/10.1002/1521-396x(199707)162:1<277::aid-pssa277>3.0.co;2-c
Abstract
No abstract availableKeywords
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