Optical ultramicrometer technique utilizing a composite diffraction grating
- 31 October 1977
- journal article
- Published by Elsevier in Optics Communications
- Vol. 23 (1), 135-138
- https://doi.org/10.1016/0030-4018(77)90144-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- An electron image projector with automatic alignmentIEEE Transactions on Electron Devices, 1975
- Photolithographic Mask Alignment Using Moiré TechniquesApplied Optics, 1972
- Double Diffraction in the Fresnel RegionJapanese Journal of Applied Physics, 1971