Growth, environmental, and electrical properties of ultrathin metal films
- 1 February 1975
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 46 (2), 791-795
- https://doi.org/10.1063/1.321647
Abstract
The conduction mechanisms of ultrathin (10−100 Å) metal films are investigated. The electrical conductivity and activation energy of discontinuous Au films grown in UHV are correlated with island size and separation and average film thickness. The relationship between film conductivity and deposition rate and substrate temperature is presented. Film temperature data indicate the validity of the proposed model. Some anomalous conductivity effects are reported for films deposited below the UHV range. The results are explained in terms of substrate and film surface contamination. Data are presented indicating the sensitivity of the conductivity of discontinuous films to ambient gas concentration. Reversible and irreversible situations are discussed.Keywords
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