Sputtering of silicon carbide coatings by low-energy hydrogen ions
- 1 June 1981
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 98 (3), 270-278
- https://doi.org/10.1016/0022-3115(81)90153-7
Abstract
No abstract availableKeywords
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- Identification of the form of carbon at a Si (100) surface using auger electron spectroscopyPhysics Letters A, 1970