Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
- 1 March 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 7 (1), 69-78
- https://doi.org/10.1109/84.661386
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
- Atomic force microscopy using a piezoresistive cantileverPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Short-timescale thermal mapping of semiconductor devicesIEEE Electron Device Letters, 1997
- Independent parallel lithography using the atomic force microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuatorsApplied Physics Letters, 1995
- Nanometer-scale recording on chalcogenide films with an atomic force microscopeApplied Physics Letters, 1995
- Tip-based data storage using micromechanical cantileversSensors and Actuators A: Physical, 1995
- Thermomechanical data storage using a fiber optic stylusApplied Physics Letters, 1994
- Micro-Temperature Measurements on Semiconductor Laser Mirrors by Reflectance Modulation: A Newly Developed Technique for Laser CharacterizationJapanese Journal of Applied Physics, 1993
- Atomic resolution with an atomic force microscope using piezoresistive detectionApplied Physics Letters, 1993
- Thermomechanical writing with an atomic force microscope tipApplied Physics Letters, 1992