Three-dimensional simulation of complex semiconductor device structures

Abstract

An overview is presented of the status of a project concerned with multidimensional numerical simulations, especially the three-dimensional simulation of complex semiconductor device structures. The authors summarize the major points of their approach to the important aspects of three-dimensional simulation, including grid generation and adaptation, the spatial discretization, and the numerical aspects of solving the nonlinear and linear systems of equations involved. Several typical results illustrate possible applications of this modeling tool.<>