Aging phenomena in heavily doped (p+) micromachined silicon cantilever beams
- 30 June 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (3), 199-206
- https://doi.org/10.1016/0924-4247(92)80167-2
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Optically controlled silicon microactuatorsNanotechnology, 1990
- Residual stress and mechanical properties of boron-doped p+-silicon filmsSensors and Actuators A: Physical, 1990
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Diffusion-Induced Dislocations in SiliconJournal of Applied Physics, 1964
- Slip Patterns on Boron-Doped Silicon SurfacesJournal of Applied Physics, 1961