High precision depth profiling of light isotopes in low-atomic-mass solids
- 1 February 1980
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 51 (2), 1259-1261
- https://doi.org/10.1063/1.327703
Abstract
An elastic recoil detection technique has been developed to depth profile light isotopes (A≲35) in low‐atomic‐mass solids (A≲16). It utilizes the maximum‐scattering‐angle property rather than an absorber to reduce background, with resultant depth precision of about ±2 μg/cm2 (100 Å). The sensitivity is ?5×1016 atoms/cm2 for isotopes lighter than the substrate and ?1015 atoms/cm2 for heavier ones.Keywords
This publication has 5 references indexed in Scilit:
- Technique for profiling 1H with 2.5-MeV Van de Graaff acceleratorsApplied Physics Letters, 1979
- Two Methods Using Ion Beams for Detecting and Depth Profiling Light Impurities in MaterialsPublished by American Chemical Society (ACS) ,1976
- Depth Distribution and Migration of Low Z Elements in Solids Using Proton Elastic ScatteringPublished by American Chemical Society (ACS) ,1976
- An accurate and sensitive method for the determination of the depth distribution of light elements in heavy materialsJournal of Applied Physics, 1976
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955