Use of the Peak-to-background Ratio for Quantitative Auger Analysis of Semi-insulating Polycrystalline Silicon Layers
- 1 March 1996
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 24 (3), 198-203
- https://doi.org/10.1002/(sici)1096-9918(199603)24:3<198::aid-sia95>3.0.co;2-4
Abstract
No abstract availableKeywords
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