Electron beam induced potential contrast on unbiased planar transistors
- 1 July 1967
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 10 (7), 701-704
- https://doi.org/10.1016/0038-1101(67)90099-8
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Scanning Electron MicroscopyPublished by Elsevier ,1966
- Application of the scanning electron microscope to semiconductor device structuresMicroelectronics Reliability, 1965
- Evaluation of Passivated Integrated Circuits Using the Scanning Electron MicroscopeJournal of the Electrochemical Society, 1964
- Direct observation of the high-field regions in GaAsSolid-State Electronics, 1963
- Factors Affecting Contrast and Resolution in the Scanning Electron Microscope†Journal of Electronics and Control, 1959
- Electron-Bombardment Conductivity of Dielectric FilmsProceedings of the Physical Society. Section A, 1951
- Conductivity Induced by Electron Bombardment in Thin Insulating FilmsPhysical Review B, 1949