Channeling effects in polycrystalline copper—a serious impediment to quantitative Auger analysis?
- 1 December 1984
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 6 (6), 282-285
- https://doi.org/10.1002/sia.740060607
Abstract
Variations in absolute Auger intensity of as much as 40% are reported for the analysis of polycrystalline copper surfaces in a high resolution scanning Auger microprobe. The angular dependent Auger yield is correlated with channeling effects of the incident electron beam. A correction procedure based upon ratioing the Auger peak intensity to the elastically backscattered electron peak, combined with an angular averaging technique can reduce the crystallographically induced Auger yield variations by a factor of four.This publication has 14 references indexed in Scilit:
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