Multichannel Nomarski microscope with polarization modulation: performance and applications
- 15 October 1997
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 22 (20), 1529-1531
- https://doi.org/10.1364/ol.22.001529
Abstract
Using a two-dimensional CCD array, a photoelastic modulator, and a commercial Nomarski microscope, we built a differential polarization interferometer. Multichannel lock-in detection of the signal allowed us to reach a shot-noise limit corresponding to 5-pm path differences for a few seconds of recording time. This interferometer was used as a surface profilometer as well as a system for imaging through scattering media.Keywords
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