Silicon-on-insulator technology for microelectromechanical applications
Open Access
- 22 March 1999
- journal article
- Published by National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka) in Semiconductor physics, quantum electronics and optoelectronics
- Vol. 2 (1), 93-97
- https://doi.org/10.15407/spqeo2.01.093
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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