Thermodynamics of AlN deposition by means of the aluminium‐trichloride‐ammonia process
- 1 January 1978
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 13 (8), 929-937
- https://doi.org/10.1002/crat.19780130808
Abstract
No abstract availableKeywords
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