Electron-induced etching of silicon by SF6
- 1 June 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 16 (4-5), 364-368
- https://doi.org/10.1016/0168-583x(86)90097-2
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
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