Fluorinated interlayer dielectric films in ULSI multilevel interconnections
- 1 July 1995
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 187, 49-59
- https://doi.org/10.1016/0022-3093(95)00110-7
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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