Microstructural properties and density dependence of the optical properties of microcrystalline silicon films by spectroscopic ellipsometry and electron microscopy
- 1 February 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 169 (1), 87-104
- https://doi.org/10.1016/s0040-6090(89)80008-2
Abstract
No abstract availableThis publication has 43 references indexed in Scilit:
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