High rate epitaxial growth of ZnO films on sapphire by planar magnetron rf sputtering system
- 1 December 1978
- journal article
- Published by Elsevier BV in Journal of Crystal Growth
- Vol. 45, 346-349
- https://doi.org/10.1016/0022-0248(78)90461-x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on SapphireJapanese Journal of Applied Physics, 1978
- R.f. sputtered epitaxial ZnO films on sapphire for integrated opticsThin Solid Films, 1976
- Scattering in ZnO-Sapphire Optical WaveguidesApplied Optics, 1975