Optimization of capactive microphone and pressure sensor performance by capacitor-electrode shaping
- 31 March 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 26 (1-3), 331-336
- https://doi.org/10.1016/0924-4247(91)87012-r
Abstract
No abstract availableKeywords
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