Properties of laser-induced thermochemical etching of InP
- 1 January 1988
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 17 (1), 29-32
- https://doi.org/10.1007/bf02652229
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Laser generated microstructuresApplied Physics A, 1985
- Laser Induced Local Etching of Gallium Arsenide in Gas AtmosphereJapanese Journal of Applied Physics, 1983
- Laser chemical etching of vias in GaAsIEEE Electron Device Letters, 1983
- Laser chemical technique for rapid direct writing of surface relief in siliconApplied Physics Letters, 1981
- Laser-induced microscopic etching of GaAs and InPApplied Physics Letters, 1980
- Temperature rise induced by a laser beam II. The nonlinear caseApplied Physics Letters, 1978
- Temperature rise induced by a laser beamJournal of Applied Physics, 1977
- Thermospannung und Wärmeleitung von III—V‐Verbindungen und ihren MischkristallenAnnalen der Physik, 1959
- HEAT TRANSFER IN SEMICONDUCTORSCanadian Journal of Physics, 1956