Detection of Neutral Species in Silane Plasma Using Coherent Anti-Stokes Raman Spectroscopy
- 1 January 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (1A), L1
- https://doi.org/10.1143/jjap.22.l1
Abstract
Coherent Anti-Stokes Raman Spectroscopy (CARS) has been employed for the first time to investigate silane (SiH4) glow-discharge plasma. By measuring ν1 vibrational line of silane as a function of position between the two electrodes, spatial distribution of silane (number density) in the (bulk) plasma has been determined for various gas pressures. It has been demonstrated that CARS is an excellent diagnostic tool for a chemically-active plasma such as silane-based glow discharge.Keywords
This publication has 5 references indexed in Scilit:
- Plasma spectroscopy—Glow discharge deposition of hydrogenated amorphous siliconThin Solid Films, 1982
- High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 rangeThe Journal of Chemical Physics, 1982
- Origin of emitting species in the plasma deposition of a-Si:H alloysJournal of Applied Physics, 1981
- Novel effects of magnetic field on the silane glow dischargeApplied Physics Letters, 1980
- Substitutional doping of amorphous siliconSolid State Communications, 1975