Preparation of SrTiO3 Thin Films by Ecr and Thermal Mocvd
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Lateral p-n junctions on GaAs(111)A substrates patterned with equilateral trianglesSurface Science, 1992
- TdI10: Ferroelectric thin films in integrated microelectronic devicesFerroelectrics, 1992
- Recent advances in physical vapor growth processes for ferroelectric thin filmsJournal of Vacuum Science & Technology A, 1992
- The deposition of alkaline earth oxides by organometallic CVDMaterials Research Bulletin, 1991
- Reactive Coevaporation Synthesis and Characterization of SrTiO3 Thin FilmsJapanese Journal of Applied Physics, 1991
- SrTiO3 and (Ba,Sr)TiO3 Thin Films Preparation by Ion Beam Sputtering and Their Dielectric PropertiesMRS Proceedings, 1991
- Chemical Vapor Deposition of Strontium-Barium-NiobateMRS Proceedings, 1991
- Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on siliconApplied Physics Letters, 1990
- Organometallic chemical vapor deposition of strontium titanateJournal of Applied Physics, 1990
- Preparation of c-Axis-Oriented PbTiO3 Thin Films by MOCVD under Reduced PressureJapanese Journal of Applied Physics, 1989