Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- 1 January 1989
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 14 (1-2), 7-12
- https://doi.org/10.1002/sia.740140104
Abstract
No abstract availableKeywords
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