Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O
- 31 May 2002
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 303 (1), 17-23
- https://doi.org/10.1016/s0022-3093(02)00958-4
Abstract
No abstract availableKeywords
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