Electron beam cutting in amorphous alumina sheets
- 1 March 1984
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 44 (5), 502-504
- https://doi.org/10.1063/1.94812
Abstract
We have found that nanometer diameter holes and slots can be cut in thin sheets of amorphous alumina using an intense electron beam. The holes, formed by a nonthermal process, are uniform in diameter, are surrounded by metallic aluminum, and can penetrate a 100-nm sheet in a few seconds. The amorphous alumina sheets are formed by anodization of electropolished high purity aluminum. The electron beam cutting seems very similar to the process reported in the metal β-aluminas. Since uniform, stable, and easily handled sheets of amorphous alumina can be fabricated and electron beam cut, this process is now practical for nanolithography as well as many other applications.Keywords
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