RF Plasmas in Methane: Prediction of Plasma Properties and Neutral Radical Densities with Combined Gas-Phase Physics and Chemistry Model
- 1 January 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (1R)
- https://doi.org/10.1143/jjap.34.261
Abstract
No abstract availableKeywords
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