Microstructures of TiN films grown by various physical vapour deposition techniques
- 1 October 1991
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 48 (1), 51-67
- https://doi.org/10.1016/0257-8972(91)90128-j
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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