Redistribution of Diffused Layers during Epitaxy and Other Process Steps

Abstract

Analysis and numerical solution are given for the redistribution of a diffused layer during epitaxialgrowth. The results show that at a relative epitaxial rate of r>2 [r=at/2 (Dt)1/2, where α is the linear rate constant of epitaxialgrowth], the problem can be regarded as diffusion in an infinite medium. Approximate analytic expressions in closed form are presented for redistribution during various sequential process steps, and are compared with exact numerical calculations.