Analysis of the thermal contribution to u.v. laser-induced oxidation of silicon and silicon monoxide

Abstract

Several groups have recently observed a specific influence of ultraviolet laser light on the oxidation of silicon and silicon monoxide. Thermodynamic calculations suggest that these results must be interpreted by carefully taking into account the possible laser-induced temperature rise of the irradiated surfaces, especially when silicon monoxide is photo-oxidized into silicon dioxide with a pulsed excimer laser.