Effects of elevated temperature treatments in microstructure release procedures
- 1 June 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (2), 66-75
- https://doi.org/10.1109/84.388114
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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