An automatic focusing and astigmatism correction system for the SEM and CTEM
- 2 August 1982
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 127 (2), 185-199
- https://doi.org/10.1111/j.1365-2818.1982.tb00412.x
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- On‐line computation of diffractograms for the analysis of SEM imagesScanning, 1980
- An automatic focusing and stigmating system for the SEMJournal of Physics E: Scientific Instruments, 1979
- Accurate stigmating of a high voltage electron microscopeJournal of Microscopy, 1977
- Controlled focusing and stigmating in the conventional and scanning transmission electron microscopeJournal of Physics E: Scientific Instruments, 1975
- Signal-to-noise ratio of electron micrographs obtained by cross correlationNature, 1975
- A digital computer method for revealing directional information in images (in electron microscopy)Journal of Physics E: Scientific Instruments, 1975
- Light Optical Convolution Computers in Electron MicroscopyZeitschrift für Naturforschung A, 1974
- Automatic Focus Control of Charged-Particle BeamsIBM Journal of Research and Development, 1968
- The Theoretical Resolution Limit of the Electron MicroscopeJournal of Applied Physics, 1949