Dry etching of crystalline quartz in a planar plasma reactor
- 1 February 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 88 (4), 347-352
- https://doi.org/10.1016/0040-6090(82)90173-0
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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