Simulation and optimization of a microfluidic flow sensor
- 1 February 2001
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 88 (2), 121-132
- https://doi.org/10.1016/s0924-4247(00)00503-3
Abstract
No abstract availableThis publication has 32 references indexed in Scilit:
- Micro flow sensor and integrated magnetic oxygen sensor using itPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Single-chip CMOS anemometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A chemical microanalysis system as a microfluid system demonstratorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1997
- Flow measurement hits homeIEEE Circuits and Devices Magazine, 1997
- A fast liquid flow sensor with thermal isolation by oxide-filled trenchesSensors and Actuators A: Physical, 1995
- An integrated mass flow sensor with on-chip CMOS interface circuitryIEEE Transactions on Electron Devices, 1992
- An electronic wind meter based on a silicon flow sensorSensors and Actuators A: Physical, 1990
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- A silicon sensor for measurement of liquid flow and thickness of fouling biofilmsSensors and Actuators, 1988
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987