Pulsed laser melting and resolidification of metal silicide layers
- 1 May 1993
- journal article
- research article
- Published by Springer Nature in International Journal of Thermophysics
- Vol. 14 (3), 383-396
- https://doi.org/10.1007/bf00566038
Abstract
No abstract availableKeywords
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- Solid state reactions in titanium thin films on siliconThin Solid Films, 1976