Magnetic and Microstructural Properties of Co–Cr Film Fabricated by Continuous Roll Coater

Abstract

Co–Cr thin films with a Ge layer between the basefilm and Co–Cr film have been fabricated at a high deposition rate using a continuous roll coater. The effects of the Ge layer and deposition conditions on the magnetic properties and microstructures have been investigated. It is concluded that the Ge layer is remarkably effective in improving the preferred c-axis orientation and magnetic properties, even though the Co–Cr films are fabricated at an extremely high deposition rate. In addition, the tilting angle of the c-axis from the normal of the film plane, which is caused by the oblique incident of the vapor, is affected by the deposition temperature and rate as well as the incident direction of the vapor.