Study of the kinetics and mechanism of the thermal nitridation of SiO2
- 15 February 1985
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 46 (4), 361-363
- https://doi.org/10.1063/1.95631
Abstract
X‐ray photoelectron spectroscopy (XPS) has been used to study the nitridation time and temperature dependence of the nitrogen distribution in thermally nitrided SiO2 films. The XPS data show that the maximum nitrogen concentration near the (SiOxNy)/Si interface is initially at the interface, but moves 20–25 Å away from the interface with increasing nitridation time. Computer modeling of the kinetic processes involved is carried out and reveals a mechanism in which diffusing species, initially consisting primarily of nitrogen, react with the substrate, followed by formation of the oxygen‐rich oxynitride due to reaction of the diffusing oxygen displaced by the slower nitridation of the SiO2. The data are consistent with this mechanism provided the influence of the interfacial strain on the nitridation and oxidation kinetics is explicitly accounted for.Keywords
This publication has 17 references indexed in Scilit:
- X-ray photoelectron spectroscopy study of the chemical structure of thermally nitrided SiO2Applied Physics Letters, 1984
- Effect of Nitridation of Silicon Dioxide on Its Infrared SpectrumJournal of the Electrochemical Society, 1984
- Hydrogen content of thermally nitrided thin silicon dioxide filmsApplied Physics Letters, 1984
- Low Pressure Nitrided‐Oxide as a Thin Gate Dielectric for MOSFET'sJournal of the Electrochemical Society, 1983
- Distribution of nitrogen in thermally nitrided SiO2Journal of Vacuum Science & Technology B, 1983
- Characterization of thermally nitrided silicon dioxideApplied Physics Letters, 1982
- Thermal nitridation of silicon dioxide filmsJournal of Applied Physics, 1982
- Nitridation of Silicon and Oxidized‐SiliconJournal of the Electrochemical Society, 1982
- Direct Thermal Nitridation of Silicon Dioxide Films in Anhydrous Ammonia GasJournal of the Electrochemical Society, 1980
- Local atomic and electronic structure of oxide/GaAs and SiO2/Si interfaces using high-resolution XPSJournal of Vacuum Science and Technology, 1979