Analysis of surface layers by the channeling technique: Beam energy dependence
- 15 February 1975
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 26 (4), 147-150
- https://doi.org/10.1063/1.88098
Abstract
The surface peak of the channeling energy spectrum has been investigated as a function of energy of the incident beam. An increase of the surface peak value with energy has been observed for axial channeling in silicon 〈110〉, germanium 〈111〉, molybdenum 〈111〉, and vanadium 〈100〉 and 〈110〉 crystals with low surface contamination. The influence of oxide layers on the energy dependence effect has been investigated on silicon crystals.Keywords
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