Normal Electric Field Dependence of Electron Mobility in MOS Inversion Layer

Abstract
Short channel MOSFETs with a channel length of 0.38 µm were experimentally investigated and analyzed using a two-dimensional device simulation. FET characteristics can be explained well when the effect of the normal field on the electron mobility (Cooper-Nelson formulas) in the inversion layers is taken into account. The normal field dependence of the electron mobility is interpreted in terms of a two-dimensional quantization of the electrons.