Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
- 1 January 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 148 (1-4), 1085-1089
- https://doi.org/10.1016/s0168-583x(98)90667-x
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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