Properties of aluminium oxide films prepared by plasma-enhanced metal-organic chemical vapour deposition
- 1 August 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 189 (1), 161-173
- https://doi.org/10.1016/0040-6090(90)90036-d
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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