A versatile spectrometer system for scanning Auger microscopy
- 1 January 1981
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 14 (1), 58-61
- https://doi.org/10.1088/0022-3735/14/1/016
Abstract
An electron spectrometer system is described with some illustrative spectra. The system combines the requirements of scanning Auger microscopy with those of high resolution spectroscopy. The spectrometer is a concentric hemispherical analyser with a four-element input lens and can be operated with a high signal sensitivity, low energy resolution (Ca 7eV window), with 0.1 sr angle or with a high resolution and reduced sensitivity.Keywords
This publication has 4 references indexed in Scilit:
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- A theoretical comparison of electron energy analysers degraded so as to obtain high sensitivityJournal of Electron Spectroscopy and Related Phenomena, 1977
- Quasi-atomic fine structure in the Auger spectra of solid silver and indiumSurface Science, 1973
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