Single-crystal aluminum nitride nanomechanical resonators
- 24 September 2001
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 79 (13), 2070-2072
- https://doi.org/10.1063/1.1396633
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Monocrystalline silicon carbide nanoelectromechanical systemsApplied Physics Letters, 2001
- VHF free-free beam high-Q micromechanical resonatorsJournal of Microelectromechanical Systems, 2000
- Growth and applications of Group III-nitridesJournal of Physics D: Applied Physics, 1998
- GaAs/AlGaAs self-sensing cantilevers for low temperature scanning probe microscopyApplied Physics Letters, 1998
- A nanometre-scale mechanical electrometerNature, 1998
- Structural properties of GaN grown by MOVPE turbodisc mass-production reactorJournal of Crystal Growth, 1997
- Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystalsApplied Physics Letters, 1996
- SCREAM MicroElectroMechanical SystemsMicroelectronic Engineering, 1996
- Patterning of AlN, InN, and GaN in KOH-based solutionsJournal of Vacuum Science & Technology A, 1996
- Fabrication of submicron high-aspect-ratio GaAs actuatorsJournal of Microelectromechanical Systems, 1993