Measurement of compositional inhomogeneity of liquid phase epitaxial InGaPAs
- 15 August 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 43 (4), 373-375
- https://doi.org/10.1063/1.94342
Abstract
Precision x-ray measurements have been performed on the compositional inhomogeneity that occurs during the initial part of the liquid phase epitaxial (LPE) growth of InGaPAs on InP substrates from step-cooled solutions. Double crystal x-ray diffraction and absorption data are presented on epitaxial layers grown short term (30 ms) and long term (1–2 min). These data are used to determine the difference in alloy composition of the two growth methods. This study indicates that long-term LPE growth of quaternary alloys is inhomogeneous, while short-term growth can be made uniform.Keywords
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