Formation of titanium silicides and their refractive index measurements
- 16 November 1987
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 125 (5), 271-275
- https://doi.org/10.1016/0375-9601(87)90208-8
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Optical constants of palladium silicides measured by a multiple-wavelength ellipsometerPhysical Review B, 1986
- Ellipsometry measurements of nickel silicidesJournal of Applied Physics, 1986
- Localized epitaxial growth of C54 and C49 TiSi2 on (111)SiApplied Physics Letters, 1985
- Silicide formation in thin cosputtered (titanium + silicon) films on polycrystalline silicon and SiO2.Journal of Applied Physics, 1980