Thermodynamic and Experimental Study of High‐Purity Aluminum Nitride Formation from Aluminum Chloride by Chemical Vapor Deposition
- 1 October 1989
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 72 (10), 1804-1810
- https://doi.org/10.1111/j.1151-2916.1989.tb05982.x
Abstract
No abstract availableKeywords
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