Electroless plating of nickel on silicon for fabrication of high-aspect-ratio microstructures
- 30 September 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 56 (3), 261-266
- https://doi.org/10.1016/s0924-4247(96)01318-0
Abstract
No abstract availableKeywords
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