Kinetic and Thermodynamic Analyses of Chemical Vapor Deposition of Aluminum Nitride
- 1 August 1991
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 74 (8), 1821-1827
- https://doi.org/10.1111/j.1151-2916.1991.tb07794.x
Abstract
No abstract availableKeywords
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